146

S. Palleboina and K. Pallela

Table 11.2 Applications of MEMS based on industrial application

Automotive sensors

Internal navigation

Air conditioning

compressors

Brake force and

suspension control

accelerometers

Fuel level and

vapour pressure

Airbag

Intelligent tyres

Electronics

Disk drive heads

Printer heads of

inkjet type

Televisions with

projection screens

Earthquake sensors

Avionics pressure

sensors

Mass data storage

systems

Medical

Blood pressure

sensors

Muscle stimulators

and drug delivery

systems

Implanted pressure

sensors

Prosthetics

Miniature analytical

instruments

Pacemakers in

cardiology

Communications

Fibre-optic network

components

RF relays, switches

and filters

Projection displays

in portable

communication

devices and

instrumentation

Voltage controlled

oscilloscopes

(VCOs)

Splitters and couplers Tuneable lasers

Defence

Munitions guidance

Surveillance

Arming systems

Embedded systems

Data storage

Aircraft

control/navigation

Source Extracted from Prime Faraday Technology Watch [1]